|PRESSURE RANGE fso (bar)||2-5-10-20-50 bar|
|TECHNOLOGY||PIEZORESISTIVE CERAMIC PRESSURE AND TEMPERATURE SENSOR|
|DIAMETER (mm)||18.00 mm|
|THERMAL DRIFT %FS/°C||≤ ± 0.05%FS/°K no PTC|
|OFFSET||-0.1 ± 0.1 mV/V|
|TERMINATION PITCH||5 pads, 1.90 mm|
|SIGNAL OUTPUT||DIFFERENTIAL SIGNAL mV/V AND T (NTC 10K)|
Metallux ME667 monolithic pressure sensors are made with a ceramic cell and work following the piezoresistive principle. The Wheatstone bridge is screen printed directly on one side of the ceramic diaphragm by means of Thick Film technology. Furthermore a NTC sensor is added to allow temperature measurement together pressure measurement. The diaphragm’s opposite side can be exposed directly to the medium to be measured. Because of the Al2O3 ceramic excellent chemical resistance (aggressive gases, most of solvents and acids, etc.), no additional protection is normally required. Thanks to the reinforced outer area (monolithic structure), the sensor can be mounted directly in a plastic or metallic case by using an O-ring. ME667 sensors are designed in such a way so that temperature changes and pressure overloads do not cause loss in reliability. Use of ceramic ensures high linearity across the entire range of measurement and minimizes effects of hysteresis.