Pressure Sensors

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ME550
PRESSURE RANGE fso (bar) 0.06-0.16-0.4-1-2-5-10-20 bar
PRESSURE TYPE GAUGE - ABSOLUTE
TECHNOLOGY CAPACITIVE CERAMIC PRESSURE SENSOR
DIAMETER (mm) 32.40 mm
STRUCTURE FLUSH DIAPHRAGM
THERMAL DRIFT %FS/°C NO
SIGNAL CONDITIONING NO
OFFSET Cx and Cr = 50-80 pF, Cx/Cr = 1 ± 0.07
TERMINATION PITCH NA
SIGNAL OUTPUT CX/CR CAPACITIVE (pF)

Metallux ME550 pressure sensors are made with a ceramic base cell and a flush diaphragm and work following the capacitive principle, in which the pressure measurement is given by the variation of capacitance due to deformation of a capacitor’s plates. The moving capacitor plate is screen printed on the flush ceramic diaphragm which is, in turn, glued to the sensor’s body. The capacitor plate faces the inside where a cavity is made and the diaphragm’s opposite side can therefore be exposed directly to the medium to be measured. The wide diameter (32.4 mm) and the use of the capacitive technology make the ME550 a sensor suitable for measuring very low pressures, as low as 60 mbar. Nevertheless, ME550 sensors feature a high burst pressure, making them quite reliable in many applications. Because of the Al2O3 ceramic excellent chemical resistance (aggressive gases, most of solvents and acids, etc.), no additional protection is normally required. Metallux ME550 sensors can be provided in the gauge or absolute versions.